Beamline 6.3.2: EUV and Soft X-Ray Reflectometry and Scattering
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Beamline 6.3.2 is a PRT-owned bend magnet beamline dedicated to EUV and soft x-ray reflectometry and scattering. The beamline, in operation since February 1995, is designed for high spectral purity and wavelength accuracy. Owned by the Berkeley Labs Center for X-ray Optics, the beamline is used for the characterization of optical components and reflective coatings for a variety of applications including EUV lithography.
High spectral resolution is obtained using a variable-line spaced plane grating monochromator. The monochromator, designed and constructed by the Center for X-ray Optics, uses no entrance slit and a fixed exit slit. The light is focussed onto the sample by the first horizontally deflecting mirror and a bendable refocusing mirror downstream from the monochromator. High spectral purity is achieved using a combination of filters and a triple mirror "order-suppressor".
A permanent reflectometer end-station is available. A sample may be positioned in three dimensions to a precision of 4 microns. Samples of up to 8 inches in diameter may be accomodated. An array of detectors including a photodiode, channeltron and CCD camera are mounted on a rotating arm. Space is available for additional endstations downstream from the reflectometer.
For more information on beamline 6.3.2, please contact: EMGullikson [at] lbl [dot] gov
