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Home › Beamlines and Endstations › Beamline 6.3.2: EUV and Soft X-Ray Reflectometry and Scattering › Beamline 6.3.2 Monochromator Resolution

Beamline 6.3.2 Monochromator Resolution

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200 l/mm





N2 Absorption Spectrum Illustrating the High Resolution

Nitrogen Absorption Spectrum

‹ Beamline 6.3.2 Flux up Beamline 11.3.2: EUV Mask Inspection ›
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